RGA 160 testing system

RGA 160 testing system

Main characteristics

• Multipurpose testing device for RGA (residual gas analysis) analysis of UHV components for cleanliness verification.
• Quantitative outgasing analysis for hydrocarbons, water vapour and other specific chemicals, based on customer needs to prevent molecular contamination.
• Fully Automated Measurement method based on ASML standard GSA 07 2221
• Dedicated control software with fully automated measurement cycle with final acceptance protocol in pdf form.
• Possibility of final plasma cleaning and vacuum bakeout of vacuum components before measurement.

Technical details – standard version

• Oil-free vacuum pumping system with trubomolecular pump and primary scroll pump
• UHV DN160 CF cubical chamber with internal volume of 7 litres
• All-metal vacuum valves
• Quadrupole mass spectrometer Pfeiffer Prisma Pro, mass range 0-200 amu, Faraday +C-SEM detector, open type ion source with Y2O3 iridium filaments
• Calibration gas mixture included
• Integrated heating for automated system bakeout, (temperature can be adjusted up to 130°C)
• Ultimate pressure up to < 5e-9 mbar (for empty chamber, after 24 hrs bakeout)
• Minimal detectable leakrate < 5e-7 mbar.l.s^-1 for H₂O; < 5e-10 mbar.l.s^-1 for CxHy
• Footprint 850x750 mm

Customization possibilities:

• Enlargement of a speciemen chaber up to 40 liters
• Dedicated pumping system for quadrupole analyzer – better stability of measurement performance
• Plasma cleaning unit – helps to keep the system in pristine condition free from hydrocarbons