Turbomolecular pumps

HiPace Turbopumps from Pfeiffer are available with two different bearing technologies: a hybrid bearing suspension and an active 5-axis magnetic levitation system. Both bearing systems convince with their individual strengths.

• Optimal operating conditions: up to 90,000 rpm for the generation of high, ultra-high and extremely high vacuums of up to <10-11 hPa and pumping speeds of 10 to > 3,000 l/s

• High efficiency due to excellent quality: up to 100,000+ h of trouble-free operating time

• High flexibility: Due their compact & lightweight design, you can integrate our turbopumps even into systems with limited space. With their IP54 rating the pumps are particularly designed for industrial use.

• Reduced production downtime: Simply replace bearings and operating materials directly in the production field.

• State-of-the-art drive electronics: reduce loss of power transmission, enable maximum energy efficiency and integration of the latest fieldbus systems

• Vibration- and noise-reduced operation: Thanks to our high-precision laser balancing method, our turbopumps are ideally suited for use in vibration-sensitive applications.

• Laser balanced rotor

• Roughly 20% lower vibration level compared to the standard rotor

• Less bearing stress due to lower vibration level

–Significant reliability improvement

• No balancing threads

–More precise balancing process (nano area)

–More robust shaft design

Range of Pfeiffer Vacuum hybrid bearings and magnetically levitated turbopumps: HiPace 10, HiPace 30 HiPace 80, HiPace 300, HiPace 350 HiPace 450 HiPace 700, HiPace 800, HiPace 1200 HiPace 1500 HiPace 2300 ATH 500 M, ATH1600M ATH 2300M