VSS Classic Evaporation and Sputtering System

Vakuum Servis VSS Classic series

Universal Customized High Vacuum Evaporation and Sputtering System with flexible technology for Production, Research and Development

Continuous developement of proven Pfeiffer Vacuum Classic system series

• Multi-purpose coating system for general vacuum experiments in the development field, and small-series production
• Heatable Stainless steel chambers with volumes from 35 to 1300 l, inner diameter 250 to 600mm (other on request), bell jar also possible
• Evaporation and Sputtering from both sides (tilting of sample)
• Various pumping stations available (Turbo-, cryo- or oil diffusion pumps)
• Final pressures < 5 · 10-7 mbar Integral leak rate < 1 · 10-5 mbar l/s

Available Sources:

• Resistance evaporators (2 – 6 kVA)
• Electron beam evaporators (3 – 15 kW) with single- or multi-pocket crucible
• Ion beam sources (IAD)
• RF and DC sputter cathodes (0.3 – 10 kW) 2“ or 4“

Evaporation:

Anti-reflective layers, Scratch resistant layers, layers for Laser mirrors, Contact metalization, Deposition of alloys (Co-evaporation)

Sputtering:

Suitable for layers: Metal layers (Au, Cu, Al, Cr, ...), Dielectric layers (SiO2, Al2O3, ...) Transparent, conductive layers (ITO) Magnetic layers Deposition of alloys (co-sputtering)

Various pumping stations available (Turbo-, cryo- or oil diffusion pumps) Vacuum chambers coolable and heatable Final pressures < 5 · 10-7 mbar Integral leak rate < 1 · 10-5 mbar l/s

1. 5. Example of sources configuration

Control system:

• PLC and industrial PC with visualisation under Windows, Remote acces, Connection to MES
• Fully automatic process control with imple management of recipes
• Detailed data logging (alarm and process archive + trending)