Diffusion Pumps

For your application we offer HSR oil diffusion pumps, reliable and well-established products made by Balzers.

Oil diffusion pumps are used for applications that require high pumping speed in high vacuum with the requirement for a sturdy and reliable pumping system. For example processes in the field of metalworking industry, pumping systems of vacuum furnaces or laboratory equipment.

HSR Diffusion oil pumps are produced with minimal connecting dimensions from DM 40 to DN 1000 with the either option of water or air cooling system.

The energy-efficient ECO versions are available in sizes DN 320 to DN 1000 and offer energy cost savings of up to 45%. The heat radiation to the surrounding air is 5% of the rated power. In conventional standard diffusion pumps, the proportion is 25%.

HSR ECO diffusion pumps have been tested both in our laboratory and under practical conditions with the propellants 66A, HSR704EU, and HSR705. It has been verified that the extraordinary performance data of HSR diffusion pumps is maintained.

To achieve the maximum energy savings of 45%, the ECO pumps feature a standby function. When activated, specific heating plates at the pump’s base are turned off. This mode is primarily suitable for overnight operation with the high vacuum valve closed. Under special circumstances and with a stable process pressure below 10^-4 mbar, the ECO pump in standby mode can also be operated at partial load. Our throttling angle valves are particularly well-suited for this purpose (see HVT angle valves).